For anyone following this thread who is attempting to install the 6-chip Rainbow TOS (1.04 / 1.4) upgrade, here is the correct cross reference for the TOS 1.0 original ROMs.
CO26160 ST U.S. TOS 1.0 256K (H2) ROM
CO26161 ST U.S. TOS 1.0 256K (H1) ROM
CO26162 ST U.S. TOS 1.0 256K (H0) ROM
CO26163 ST U.S. TOS 1.0 256K (L2) ROM
CO26164 ST U.S. TOS 1.0 256K (L1) ROM
CO26165 ST U.S. TOS 1.0 256K (L0) ROM
This list is taken from the Atari TOS components list on the Best Electronics website located here: http://www.best-electronics-ca.com/custom-i.htm
All you need are the H2/H1/H0/L2/L1/L0 markings on the TOS 1.4 chips in order to swap them out. They may be marked HI-0, LO-2, etc. instead of H0 and L2.
I installed them incorrectly at first, because my initial web search took me to the diagram attached at the top of this message thread: http://www.atari-forum.com/viewtopic.php?f=15&t=23459&start=25
If you compare the component numbers and their H# and L# numbers in the listing above to the ones in that diagram, you will see that they are marked differently. Chip 26160 is listed above as H2, not L2 (and so forth).
When I used the diagram in that thread to match up the chips, my 520ST booted to a blank white screen and did not read the floppy disk at startup.
When I used the list above to identify the chip locations, the system booted normally and displayed the Rainbow TOS banner in the "About..." dialog.
Just FYI. It's quite enjoyable to have upgraded my very old ST to a somewhat less very old ST.